Plasma  Immersion Ion Implantation

Indigenously designed and fabricated by M/s. Vacuum Techniques, Bangalore.
Magnetron sputtering deposition (RF 600W, DC 1500W).
Substrate biasing for PIII 40 kV in 3 stages with frequency from 0.1kHz to 1kHz.
Stage-1: 1 to 3kV, Stage-2: 3 to 20kV, Stage-3: 20 to 40kV Low voltage,High freq: 2kV , 5-50kHz.
Substrate temperature 700 degree Celsius.

Plasma enhanced-CVD

Indigenously designed and fabricated by M/s. Vacuum Techniques, Bangalore.
ECR source (Rath & Rau, 1200W, 2.45GHz, 3-subtuners).
Micro wave power adjustable 10 to 100% Vacuum level (10-7mbar) Substrate temperature 1000°C.
Hot gas and liquid precursor injection.
Magnetic field 875 G Plasma density ~ 10^17 to 10^18 ions/cc
 

 Scanning Probe Microscope

Solver-Pro, M/s. NT-MDT, Russia.
STM (imaging & spectroscopy).
AFM (contact & non-contact, AFAM, MFM, EFM SKM , SCM , SRI

Scanning Near Field Optical Microscope

Nanofinder, M/s. NT-MDT, Russia.
Optical & Confocal Imaging Shear force – topography, mapping.
Spectroscopy (nano-Raman, Fluorescence, PL)

CVD Chamber for Vapour-Liquid-Solid Growth of Nanostructures

MFC controlled Gas Injection Port.
Pressure : 0.001-1200 mBar (Strain Gauge Sensor) Max.
Temperature 1473 K
 

TGA-EGA-MS

Indigenously designed and developed TG-DTA (Setaram 16/18 : Temperature ranage (300-2000K)).
QMA (Hidden , 1-300 amu, 10^-14 mbar partial pressure .
MFC based gas vapour delivery .
Synthesis of nanocrystalline materials by vaccum thermal decomposition Synthesis of overlayers(nitrides,carbides) by gas phase reaction.  
 

Leica DMI 5000 M – Advanced Metallurgical Microscope

Inverted metallurgical microscope capable of reflected and transmitted light microscopy.
Fully motorised X, Y & Z movements. Onscreen lighting and contrast adjustments.
Leica DFC 290 colour CCD camera. Max. Magnification – 2000X ( Tube lens). BF/DF/Pol/DIC Contrast.
Extended focus for irregular specimen (max 60 steps) Onscreen Manual measurement.
Phase analysis, Particle size analysis, coating thickness measurement, etc as per various international standards.
Software routines for report generation.
Tungsten and Mercury lamp illumination.  
 

Micro Raman Spectrometer

Micro-Raman Spectrometer (Renishaw inVia) : Excitations 325, 488, 514.5 and 785 nm; Detection Limit 325-1700 nm, Temperature 77-600 K

Three Zone Tube Furnace

(80 O.D x 74 ID. x 1400 L) mm fused quartz tube; Max. Temperature 1475 K; Three zones: (660mm in total), each zone 220mm heating length

Double Barrier LB trough

Used for monolayer and multilayer deposition of organic tailored thin films for microelectronics, sensor applications.