Electron Beam Deposition

Indigenously designed and fabricated by M/s Vacuum Techniques, Bangalore.
Temescal SIMBA power supply (12 kW, 10 kV) .
270 degree multi turret e-gun Additional RF magnetron sputter source.
Facility for reactive plasma assisted evaporation

Laser assisted spray pyrolysis

Indigenously designed and developed.
Nd:YAG CW laser, CAT, Indore.
Fiber optic coupled X-Y raster stage (8cm X 8 cm).
Ultrasonic Nebulizer (2.4 MHz).
Scanning ~ 1 mm/sec . 

Pulsed Laser Deposition

Indigenously designed and fabricated by M/s Excel Instruments, Pune.
Solid-state Nd:YAG 1064 nm laser Pulsed laser ( nano second pulse).
UHV chamber Automated six target carrousel.
Local plasma shroud

Pulsed DC Magnetron Sputtering

Indigenously fabricated .
5 kW bipolar pulse DC power supply.
2 inch circular magnetron (1kW)

RF/DC Magnetron Sputtering

Supplied by M/s. MECA, France.
Sputter guns: 2 RF (600W) & 1 DC(1500W).
Substrate rotation, Heating (1000 degree C).
Precise control of vacuum and gas flow .
Thickness monitor (Maxtek).  

Thermal CVD

Indigenously designed and fabricated by M/s. Vacuum Techniques, Bangalore.
Cold walled Substrate temperature 800 degree C Coating area (100cm2).
Hot gas and liquid precursor injection

Combustion CVD

Indigenously designed and fabricated by M/s. Vacuum Techniques, Bangalore.
Raster stage (X-Y-Z) (50cm X 50cm X 50cm).
Ultrasonic nebulizer (1.6MHz).
Diffusion burner .
Scanning ~ 5 mm/sec to 10mm/sec .

Secondary Ion Mass Spectrometry

IMS(7f) M/s. Cameca, France.
Double focusing Mass Analyzer.
Ion microscope and microprobe modes .
Duo plasmatron and Cs ion beam sources.
RAE imaging.
Post acceleration for uniform sensitivity over the mass range.

 

Ellipsometry

ESVG, M/s. SOPRA, France.
Rotating polarizer type.
Wavelength range 195nm – 220nm.
Variable angle 40degree - 90 degree.
Temperature range 4.2K to 700K

Nanoindentation

M/S. CSM, Switzerland.
Micro indentation range (0.05N – 30N).
Nano indentation range (0.1mN – 500mN).
Micro scratch (0.05N to 30N).
AFM ( topography).

Cold Gas Dynamic Spray

Supplied by DYMET, Germany.
Deposition Efficiency 80% (recycle powders).
Velocity of the jet 800 to 1000m/s.
Preheating the powders (200 to 600 degree Celsius).  

Calowear

M/s. CSM, Switzerland.
Thickness of coating (0.1 to 50 micrometer).
Rotation speed 10 to 2999 rpm.
Precision (1 to 5%) SiC slurry used (0.2 micrometer).

Surface Profilometer

Dektak 6M, M/s. Veeco (USA).
12 micro meter tip radius Stage rotation 360 degree.

 Scratch Tester

Revtest, M/s. CSM, Switzerland.
Micro scratch (1N to 300N).
 

 Tribometer

Tribometer, M/s. CSM, Switzerland.
Max normal load 10N Max size.
Rotation speed (1 to 500rpm) pin and ball on type.
 

Nano Tribometer

Rotation Speed:  1 to 100 rpm
Load Range : 50 μN - 1 N
Frictional Force:  10 mN - 1 N
Temperature:  Room temperature

Rapid Thermal Annealing

Max. Substrate Diameter: 4”
Purge gas line : Ar, N2 or O2
Vacuum/air/gas annealing modes
Temperature range = up to 1300°C
Max. Power = 30kW
Ramp rate : 150-200 °C/sec
Precise thermocouple controlled operations
Custom written recipes with 30 steps possible
Computer controlled operation